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1

Non-destructive, interferometric method for measuring the thickness of a silicon membrane

J.M. Adee, Ch. Steinbrüchel

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 278 KB

english, 1997

2

Energy transfer in adsorption. I. Experiments

Steinbrüchel, Ch., Schmidt, L. D.

Journal:

Physical Review B

Year:

1974

Language:

english

File:

PDF, 484 KB

english, 1974

3

Energy transfer in adsorption. II. Model calculations

Steinbrüchel, Ch., Schmidt, L. D.

Journal:

Physical Review B

Year:

1974

Language:

english

File:

PDF, 652 KB

english, 1974

4

Condensation of gases on metals: The one-dimensional square well model

Ch. Steinbrüchel, L.D. Schmidt

Journal:

Solid State Communications

Year:

1973

Language:

english

File:

PDF, 109 KB

english, 1973

5

Absolute measurement of sputtered ion fractions using matrix isolation spectroscopy

Ch. Steinbrüchel, D.M. Gruen

Journal:

Surface Science Letters

Year:

1980

Language:

english

File:

PDF, 63 KB

english, 1980

6

Kinetics of photo-induced diffusion and clustering of matrix isolated metal atoms

Ch. Steinbrüchel, D.M. Gruen

Journal:

Surface Science Letters

Year:

1981

Language:

english

File:

PDF, 51 KB

english, 1981

7

Condensation of gases on metals: The one-dimensional square well model

Ch. Steinbrüchel, L.D. Schmidt

Journal:

Journal of Physics and Chemistry of Solids

Year:

1973

Language:

english

File:

PDF, 343 KB

english, 1973

8

Isotope effects in electron impact desorption of CO and O2adsorbed on the (110) plane of tungsten

C. Leung, Ch. Steinbrüchel, R. Gomer

Journal:

Applied Physics A: Materials Science & Processing

Year:

1977

Language:

english

File:

PDF, 648 KB

english, 1977

9

Oxygen adsorption on the tungsten (110) plane. Electron impact and thermal desorption at high temperatures

Ch. Steinbrüchel, R. Gomer

Journal:

Applied Physics A: Materials Science & Processing

Year:

1978

Language:

english

File:

PDF, 716 KB

english, 1978

10

Desorption rates and mechanisms for dissociatively chemisorbed molecules

Ch. Steinbrüchel

Journal:

Applied Physics A: Materials Science & Processing

Year:

1979

Language:

english

File:

PDF, 670 KB

english, 1979

11

Diagnostics of Low-Pressure Oxygen RF Plasmas and the Mechanism for Polymer Etching: A Comparison of Reactive Sputter Etching and Magnetron Sputter Etching

Steinbruchel, Ch., Curtis, B. J., Lehmann, H. W., Widmer, R.

Journal:

IEEE Transactions on Plasma Science

Year:

1986

Language:

english

File:

PDF, 1.74 MB

english, 1986

12

Heat dissipation in catalytic reactions on supported crystallites

Ch. Steinbrüchel, L.D. Schmidt

Journal:

Surface Science

Year:

1973

Language:

english

File:

PDF, 938 KB

english, 1973

13

Relative sticking coefficients of H2 and D2 on tungsten

S.M. Ko, Ch. Steinbrüchel, L.D. Schmidt

Journal:

Surface Science

Year:

1974

Language:

english

File:

PDF, 300 KB

english, 1974

14

The adsorption of CO on the (110) plane of tungsten; LEED, XPS, and Auger measurements

Ch. Steinbrüchel, R. Gomer

Journal:

Surface Science

Year:

1977

Language:

english

File:

PDF, 1.80 MB

english, 1977

15

Model calculation of gas-surface energy accommodation coefficients: The importance of multiple collisions and of trapping

Ch. Steinbrüchel

Journal:

Surface Science

Year:

1977

Language:

english

File:

PDF, 841 KB

english, 1977

16

Absolute measurement of sputtered ion fractions using matrix isolation spectroscopy

Ch. Steinbrüchel, D.M. Gruen

Journal:

Surface Science

Year:

1980

Language:

english

File:

PDF, 716 KB

english, 1980

17

Kinetics of photo-induced diffusion and clustering of matrix isolated metal atoms

Ch. Steinbrüchel, D.M. Gruen

Journal:

Surface Science

Year:

1981

Language:

english

File:

PDF, 317 KB

english, 1981

18

The scattering of phonons of arbitrary wavelength at a solid-solid interface: Model calculation and applications

Ch. Steinbrüchel

Journal:

Zeitschrift für Physik B Condensed Matter

Year:

1976

Language:

english

File:

PDF, 580 KB

english, 1976

19

Angular Dependence of Sticking Coefficients on Tungsten

Steinbrüchel, Ch., Schmidt, L. D.

Journal:

Physical Review Letters

Year:

1974

Language:

english

File:

PDF, 278 KB

english, 1974

20

Abstract: Ordered surface structures of CO on W(110)

Steinbruchel, Ch.

Journal:

Journal of Vacuum Science and Technology

Year:

1977

Language:

english

File:

PDF, 324 KB

english, 1977

21

The Importance of Self-Sputtering by Low Energy Ions in Partially Ionized Beam Deposition

Bai, P., SteinbrÜChel, CH., Lu, T.-M.

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 276 KB

english, 1989

22

Reactive Ion Etching of Copper with SiCl4 and CCl2F2

Howard, B. J., Wolterman, S. K., Yoo, W. J., Gittleman, B., SteinbrÜchel, CH.

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 1.14 MB

english, 1990

23

Mechanism of Dry Etching of Silicon Dioxide: a Case of Direct Reactive Ion Etching

Steinbruchel, Ch., Lehmann, H. W., Frick, K.

Journal:

MRS Proceedings

Year:

1984

Language:

english

File:

PDF, 281 KB

english, 1984